Drilling into any population

Lesson 08

Learn tsmap

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In this lesson

Sooner or later you want to ask about part of the data: one split, one bin, one region of a wafer. This lesson shows the two tools for that, filters and selections, and what the right-click menu does with them.

  • Keep only the wafers and dies that meet your conditions
  • Chart and tabulate any selection, bin or wafer
  • Know what each entry of the right-click menu opens
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Filtering

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Filter…

Filter… lets you look at only the data you care about. The button is at the right of the toolbar, beside Maps and Insights. It keeps only the wafers and dies that meet conditions you set, in the gallery, on a single map and on every Insights tab.

The Filter… button, outlined

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The Filter window

Add conditions; every one must hold. At the bottom of the window, Apply filters and Cancel leaves things as they were.

The empty Filter window

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Choose a field

Each condition starts with a field: a test, a die field such as bin, ring or site, or a wafer field such as split, lot or yield. Type to search the list.

The list of fields for a condition

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Category and number fields

A category field, such as the split, lists its values to tick; is not keeps everything except the ticked values. A number field, such as a test or a wafer's yield, keeps a range.

A condition on Split, with every value ticked

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What it would keep

Untick every split except SS. As you edit, the window shows how many wafers and dies the conditions would keep, so you can check the filter before you apply it.

Only SS ticked: keeps 4 of 25 wafers

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The filter as text

Conditions | JSON at the top of the window switches between the list of conditions and the same filter written as text. Edit it, paste one a colleague sent, or Copy it.

The same filter as JSON: split is SS

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Suggestions in the JSON

  • Suggest, or typing a comma or a brace, offers the keys, the lot's fields and tests, and the values a field takes
  • The line under the text says how many wafers and dies the filter keeps, and follows what you type
  • While the text cannot be read, Apply is held and the window says why
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Wafer or die

A condition works on one of two levels, and they behave differently.

  • A wafer condition keeps whole wafers; the rest leave the gallery
  • A die condition keeps matching dies; the rest are drawn faded
  • The Summary panel and findings are worked out again over what is kept
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Saved filters

If you use a filter again and again, save it.

  • Save keeps the conditions under a name
  • Load puts them in the window to check; Apply uses them
  • Export… writes the list to a file; Import… reads one back in

The window after saving the filter as SS wafers

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Applied

With the filter applied, four cards remain (W04, W11, W18 and W24), and the legend and yield describe only those wafers.

The gallery filtered to the SS wafers

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The filter line

A line above the view always states the filter and what it keeps. Its checkbox switches the filter off and on without losing it. 1 Edit… reopens the window; 2 Remove deletes the filter.

The filter line with Edit… and Remove outlined

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Insights follows

There is one filter for everything you are looking at, so Insights shows the same four wafers, and its charts and the Group by control work on what is kept. You never have to set the same filter twice.

Insights Overview with the SS filter on

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The filter stays

tsmap remembers the filter, and whether it is on, for the next lot and the next start. The line above the view always states it, so a carried-over filter is never applied unseen. Remove forgets it.

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Charting a population

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Select dies

A filter is for the whole session. A selection is for a quick question. Drag a box on a map: the selected dies keep their colour and the rest fade, with an outline round them. Ctrl or Cmd + click adds or removes a die; Esc clears.

A box dragged on W02; the other dies are faded

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Right-click

Right-click the selection to ask about just those dies. The menu offers charts and tables: Distributions, your Plots, and Tables.

The right-click menu on a selection

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Value histogram

Value histogram shows how one test is distributed over just those dies, which tells you whether the selected region reads differently from the rest. The title and the line above state the population, so it cannot be mistaken for the whole wafer. The PAT lines are outlier limits worked out per wafer (lesson 05).

A value histogram of 60 selected dies

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Process capability

Process capability shows each test's spread over the selected dies only, drawn against its limits and ordered worst Ppk first. Lesson 06 explains Ppk and charts the whole lot's capability, for comparison.

Process capability of the selected dies

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Test statistics

Test statistics shows the Test Values and Functional Tests tables, over the same dies.

Test statistics for the selected dies

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Dies

The Dies table has one row per selected die, with its position, bins and every test value. Export CSV writes the table to a file and Copy puts it on the clipboard. Choose Wide (a column per test) or Long (a row per die and test) first.

The Dies table for the selection

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A snapshot of its dies

These charts are snapshots, so they do not change under you.

  • Each chart states its population, so it is never taken for the whole lot
  • A chart already open keeps its dies when the selection changes
  • An entry that cannot be drawn stays, greyed, with the reason
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What you right-click decides the population

The menu is always the same. What changes is which dies it covers.

If you right-click… the charts and tables cover…
dies you have selected just those selected dies
empty map space, with nothing selected every die on that wafer
a card's header every die on that wafer
a bin in the legend every die in that bin, on every wafer
a finding in the Summary panel the dies the finding is about
a bar, box or point in an Insights chart that wafer, or the dies the mark counts
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A bin

To study one failure mode across the whole lot, right-click a bin in the gallery's legend. The menu opens on that bin's dies on every wafer of the lot. It leaves your selection as it is; the legend only changes what is drawn.

The menu opened from the bin 3 legend entry

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A whole wafer

Each card's Charts and tables button, the small chart icon in its toolbar, opens the same menu for that wafer.

A card's Charts and tables button, outlined

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Try it yourself

  1. In the web app, Load sample data
  2. Filter…, add Split, keep only SS, Apply
  3. Remove the filter. Drag a box on W02 · FF and right-click it
  4. Open Value histogram, then Process capability: which test has the lowest Ppk?
  5. Right-click bin 3 in the legend and open Dies
  6. Open Filter… and check no filter is left set, as filters are kept between lots
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Check your results

  1. It depends on the box you drag, because the card judges only those dies. For the 60 dies on the slide, vth_p_mV is lowest, at 0.46. Whatever the box, the worst Ppk comes first.
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Recap

  • Filter… keeps wafers and dies by condition, in every view
  • Select dies, then right-click for charts and tables of just those dies
  • A bin, a wafer or a finding each opens the same menu on its own dies

Next, make new tests of your own, and read a run of tests as a curve.

More in the wafer map guide

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Next lesson

09 · Derived tests →

Compute new tests from measured ones.

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